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本文结合目前多晶硅铸锭炉生产期间所用的设备、工艺步骤与控制系统进行了分析,同时对锭炉技术、优化方法进行了说明。
In this paper, the equipment, process steps and control system used in the current production of polycrystalline silicon ingot furnace are analyzed. At the same time, the technology of furnace and the optimization method are described.