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众所周知,半导体器件和集成电路的成品率和优品率与外延层的质量密切相关,但氧化感生层错和外延堆垛层错却会严重影响外延层的质量。为此外国科学家及有关部门
It is well-known that the yield and yield of semiconductor devices and integrated circuits are closely related to the quality of the epitaxial layers. However, the oxide layer faults and the epitaxial stacking faults will seriously affect the quality of the epitaxial layers. For this purpose, foreign scientists and relevant departments