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本文以实例介绍S—570扫描电镜数例故障现象及排除的方法。[例一]一、故障现象:电镜在工作过程中,突然高压掉下,高压关闭,真空指示回转,真空绿色指示灯熄灭。二、检测:1.真空系统F_3熔断;2.冷测EVAC电源板,Q_6ec击穿,Q_1Q_2ec短路,焊下Q_1Q_2测量未坏,复位,发现散热板与be脚短路,因散热板有方位性,其中一散热板方位反了,窄空位朝be脚,使之碰触短路,这种反位是原机装板时所误;3.通电检查。A_3灯亮,但24V垮到8V左右,DP未工作,A_3电磁阀烧坏。三、故障排除:1.将散热板方位校正。Q_1Q_2短路排除;2.自制A_3线圈换上,工作恢复正常。
In this paper, an example to introduce S-570 Scanning Electron Microscopy failures and troubleshooting methods. [Example 1] First, the fault phenomenon: Electron microscope in the work process, suddenly high pressure fell off, high pressure off, the vacuum instructions turn, vacuum green light goes out. Second, the test: 1 vacuum system F_3 fuse; 2 cold test EVAC power supply board, Q_6ec breakdown, Q_1Q_2ec short circuit, welding Q_1Q_2 measurement is not bad, reset and found that the cooling plate and the begg foot short circuit, One of the anti-heats the direction of the radiator, the narrow space toward the be berth, so that touch the short circuit, this anti-bit is the original machine installed the wrong board; 3. Power check. A_3 light, but the collapse of 24V 8V or so, DP did not work, A_3 solenoid valve burned out. Third, troubleshooting: 1. Radiator orientation correction. Q_1Q_2 short circuit excluded; 2 homemade A_3 coil replaced, the work returned to normal.