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1.引言在研制双绝缘层(绝缘层/EL有源层/绝缘层)薄膜电致发光器件过程中,人们对EL有源层花费了很大精力。然而,由于绝缘层在实现高稳定性和高可靠性方面所起的重要作用使人们不得不对此也给予较多的关注.可以毫不夸张地说,合适的绝缘层可以使TFEL器件作为信息显示屏而获得实际应用。对于TFEL所用绝缘材料的实验已有许多报道。然而除SiO_2,Si_3N_4,Al_2O_3和
1. Introduction During the development of double-insulated (insulating / EL active / insulating) thin-film electroluminescent devices, much effort has been spent on the EL active layer. However, due to the important role that insulating layers play in achieving high stability and high reliability, one has to pay more attention to this.It is no exaggeration to say that a suitable insulating layer can make TFEL devices as information display Screen and get practical application. There have been many reports of experiments on TFEL insulation materials. However, in addition to SiO_2, Si_3N_4, Al_2O_3 and