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本文详细介绍了一种单片硅平面振动式微型加速计的结构及其工作原理。分析了在其设计制造过程中所需考虑的各个因素。最后还介绍了其工艺实现方法。
This paper describes in detail the structure and working principle of a monolithic silicon planar vibrating micro accelerometer. The factors that need to be considered in the design and manufacturing process are analyzed. Finally, it also describes the method of its realization.