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针对一种喇曼型声表面波声光器件的设计需求,设计制作出一种能够满足喇曼-奈斯衍射要求的、低损耗、高Q值声表面波谐振器。利用耦合模(COM)理论仿真谐振器的性能,建立谐振器的COM模型,求解COM方程,提取出COM参数。利用COM软件仿真设计谐振器的结构参数,设计的谐振器中心频率为78.028MHz,Q值为10 428,插入损耗为-6.153dB。利用微加工技术加工制作出声表面波谐振器,用矢量网络分析仪对其性能进行测试,得到谐振器实际中心频率为78.34MHz,插入损耗为-11.273dB,Q值为6 465.7,该谐振器能够满足喇曼型声表面波声光器件的应用需求。
Aiming at the design requirements of a Raman SAW acousto-optic device, a low-loss, high-Q SAW resonator designed to meet the Raman-Nees diffraction requirements was designed. The performance of the resonator is simulated by the theory of coupled mode (COM), the COM model of the resonator is established, the COM equation is solved, and the COM parameter is extracted. The structure parameters of the resonator are simulated by COM software. The designed resonator center frequency is 78.028MHz, the Q value is 10 428 and the insertion loss is -6.153dB. The surface acoustic wave resonator was fabricated by using micro-machining technology and its performance was tested by a vector network analyzer. The actual center frequency of the resonator was 78.34MHz, the insertion loss was -11.273dB and the Q value was 6 465.7. The resonator It can meet the application requirements of Raman SAW acousto-optical device.