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分析了声表面波（SAW）力传感器加载后，频率稳定性变差的原因．设计了一种新型的采用等强度梁的力传感器，并通过采用特殊的器件封装方法达到了既保护了表面电极又不影响传感器灵敏度的目的。给出了该传感器的频漂实验和力-频特性实验结果。
The reason why the frequency stability is worsened after the SAW force sensor is loaded is analyzed. A new type of force sensor with equal strength beam is designed and a special device encapsulation method is adopted to achieve the purpose of protecting the surface electrode without affecting the sensitivity of the sensor. The frequency drift experiment and force-frequency experiment results of the sensor are given.