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设计了列阵开槽耦合放电脊波导。在脊波导中进行了CO2 激光混合气体放电实验。在长为380mm ,截面为3×25m m2的脊放电通道内,使用2-45GHz 微波激励,得到了较为均匀的放电。在较宽的气压变化范围(1KPa~9KPa)内,脊通道内的微波自持放电均能够均匀进行。实验表明,这种微波放电装置是产生长程均匀放电激光等离子体柱的一种有效方法。
The array slotted coupling discharge ridge waveguide was designed. In the ridge waveguide CO2 laser mixed gas discharge experiments were carried out. In a longitudinal discharge channel with a length of 380mm and a cross-section of 3 × 25m m2, a 2-45GHz microwave excitation was used to obtain a more uniform discharge. Within a wide range of pressure changes (1KPa ~ 9KPa), the ridge channel microwave self-sustained discharge can be carried out evenly. Experiments show that this microwave discharge device is an effective method to produce long-range uniform discharge laser plasma column.