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可调谐二极管激光吸收光谱(TDLAS)技术可用于气体温度的高精度快速测量,但目前TDLAS技术研究一般集中在正压范围,真空环境下该技术的应用研究较少。本文利用波长调制法对TDLAS进行真空下温度测量的溯源性和误差进行了实验研究并进行不确定度分析。实验以一等标准铂电阻温度计作为标准,以高精度恒温槽作为温源,采用自研的真空下温度校准装置,选取C2H2分子6558 cm-1附近处谱线对进行真空下的温度测量。实验结果表明:在中低温范围内,采用C2H2作为分析气体,TDLAS测温具有良好的稳定性和灵敏度,同一等标准铂电阻的误差不超过±0.2℃,测量结果的扩展不确定度U=0.24℃,k=2。
Tunable diode laser absorption spectroscopy (TDLAS) can be used for high-precision and rapid measurement of gas temperature. However, the current research on TDLAS technology generally focuses on the positive pressure range, and the application of this technology in vacuum environment is less studied. In this paper, the traceability and error of TDLAS under vacuum are experimentally studied by wavelength modulation method and the uncertainty is analyzed. Experiments with first-class standard platinum resistance thermometer as a standard to high-precision constant temperature bath as a source of temperature, self-developed vacuum temperature calibration device, select the C2H2 molecules near the 6558 cm-1 line temperature under vacuum measurements. The experimental results show that: in the low temperature range, the use of C2H2 as the analysis gas, TDLAS temperature measurement has good stability and sensitivity, the same standard platinum resistance error does not exceed ± 0.2 ℃, the expansion of measurement uncertainty U = 0.24 ℃, k = 2.