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本文采用离子束辅助沉积技术，制备了不同成分梯度的一系列（Ｔｉ１－ｘＡｌｘ）Ｎ膜（其中ｘ＝０．１６～０．４４），并利用刮剥式结合强度测量方法，对薄膜成分对结合强度、内应力、硬度等的影响进行了研究。研究工作发现，刮剥法测得的结合强度，在ｘ＝～０．３１处取得最大结合强度值后，随薄膜成分梯度的增大而下降，但在重要的４０％～５０％Ａｌ区域内，梯度（Ｔｉ，Ａｌ）Ｎ膜的结合强度、硬度以及内应力却都维持在一个较为稳定的水平，较少受薄膜成分等的影响。梯度（（Ｔｉ，Ａｌ）Ｎ膜的结合强度主要受膜中残余应力的影响。
In this paper, a series of (Ti1-xAlx) N films with different compositional gradients (x = 0.16 ~ 0.44) were prepared by ion beam-assisted deposition technique. By means of the stripping bond strength measurement method, Combined with the strength, internal stress, hardness and other effects were studied. The study found that the stripping stripping method to determine the bonding strength, maximum bonding strength obtained at x = ~ 0.31, with the gradient of the film composition decreases, but in the important 40% ~ 50% Al region , The bonding strength, hardness and internal stress of gradient (Ti, Al) N films are all maintained at a relatively stable level, less affected by the film composition and the like. The bonding strength of the gradient ((Ti, Al) N film is mainly affected by the residual stress in the film.