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采用有限元分析方法,分析了压电双晶片悬臂梁的位移形变特征。研究了金属弹性层、压电陶瓷片的材料属性及几何尺寸对双晶片偏转位移的影响;计算了双晶片的弹性模量、厚度以及加载电压与位移形变产生弯应力的关系;通过位移测试、弯应力测试等相关实验对有限元分析进行了验证。当加载电压为60V(120Vp-p)时,双晶片的偏转位移和弯应力分别为166μm和34.7m.N,实验结果证明本文所建的有限元模型是合理有效的。此外,测试了压电双晶片的振动特性,测得其谐振频率为310Hz,在该频率下加载20Vp-p电压,其端部位移输出即可达1.7mm。有限元分析结果及实验验证为压电双晶片结构的优化设计提供了依据。
The displacement deformation characteristics of the piezoelectric bimorph cantilever were analyzed by finite element method. The influence of material properties and geometrical dimensions of the metal elastic layer and the piezoelectric ceramic sheet on the deflection displacement of the bimorph is studied. The elastic modulus and thickness of the bimorph and the relationship between the loading voltage and the bending stress caused by the displacement deformation are calculated. By the displacement test, Bending stress test and other related experiments on the finite element analysis was verified. When the applied voltage is 60V (120Vp-p), the deflection displacement and bending stress of the bimorphs are 166μm and 34.7mN, respectively. The experimental results show that the finite element model proposed in this paper is reasonable and effective. In addition, the vibration characteristics of the piezoelectric bimorph was tested. The resonant frequency of the piezoelectric bimorph was measured to be 310Hz. The 20Vp-p voltage was applied at this frequency, and the displacement output of the terminal reached 1.7mm. Finite element analysis results and experimental verification provide the basis for the optimal design of the piezoelectric bimorph structure.