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1.前言 1973年Nelson发明液相生长法以来,一直用来生长各种器件所用的化合物半导体晶片。尤其在AlGaAs双异质结激光器(DH激光器)中用液相生长法生长的多层晶片,具有良好的性能。
1. Introduction Nelson invented the liquid-phase growth method in 1973 and has been used to grow compound semiconductor wafers for various devices. In particular, multi-layer wafers grown by liquid phase growth in AlGaAs double heterojunction lasers (DH lasers) have good properties.