论文部分内容阅读
Ta/NiOx/Ni81Fe19/Ta multilayers were prepared by rf reactive and dc magnetron sputtering. The exchange coupling field ( Hex) and the coercivity ( Hc) of NiOx/Ni81Fe19 as a function of the ratio of Ar to O2 during the deposition process were studied. The composition and chemical states at the interface region of NiOx/NiFe were also investigated using the X-ray photoelectron spectroscopy (XPS) and peak decomposition technique. The results show that the ratio of Ar to O2 has great effect on the nickel chemical states in NiOx film. When the ratio of Ar to O2 is equal to 7 and the argon sputtering pressure is 0.57 Pa, the x value is approximately 1 and the valence of nickel is + 2. At this point, NiOx is antiferromagnetic NiO and the corresponding Hex is the largest. As the ratio of Ar/O2 deviates from 7, the exchange coupling field ( Hex) will decrease due to the presence of magnetic impurities such as Ni +3 or metallic Ni at the interface region of NiOx/NiFe, while the coercivity ( Hc) will increase due to
The exchange coupling field (Hex) and the coercivity (Hc) of NiOx / Ni81Fe19 as a function of the ratio of Ar to O2 during the deposition process were The composition and chemical states at the interface region of NiOx / NiFe were also investigated using the X-ray photoelectron spectroscopy (XPS) and peak decomposition technique. The results show that the ratio of Ar to O2 has great effect on the nickel chemical When the ratio of Ar to O2 is equal to 7 and the argon sputtering pressure is 0.57 Pa, the x value is approximately 1 and the valence of nickel is + 2. At this point, NiOx is antiferromagnetic NiO and the The Hex is the largest one. As the ratio of Ar / O2 deviates from 7, the exchange coupling field (Hex) will decrease due to the presence of magnetic impurities such as Ni +3 or metallic Ni at the interface region of NiOx / NiFe, while the coercivity (Hc) wi ll increase due to