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日本松下电器产业公司,研制出世界最高精度的UA3P型超高精度三维测量机,该机装有原子键能探测器,能以最高十纳米精度测量最大倾斜角度达到60°的任意三维形状,其测量范围直至400nm。 过去接触式三维测量机,因为精度低约为1μm,所以该公司几年前就研制利用光探测器的超高精度三维测量机,并实用化了。可是因为过去的光探测器只能测量到30°的倾斜角,所以即便用极座标测量也不能对快速
Japan’s Matsushita Electric Industrial Co., Ltd. developed the world’s highest precision UA3P ultra-high precision three-dimensional measuring machine equipped with atomic energy detector can measure up to 10 nanometers maximum tilt angle of any three-dimensional shape of 60 °, which Measuring range up to 400nm. In the past, contact-type three-dimensional measuring machines, due to their low accuracy of about 1 μm, were developed several years ago by ultra-precision three-dimensional measuring machines using photodetectors and put into practical use. However, because of the past optical detector can only measure the tilt angle of 30 °, so even with polar coordinates measurement can not be fast