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分析了典型位置泄漏时的废气流量及成分变化,根据其变化特性判断真空系统的运行状态是否良好,粗略判断泄漏点位置,缩小泄漏排查范围,是缩短RH真空系统泄漏维护的有效手段之一。
The exhaust gas flow rate and composition change during the typical position leakage are analyzed. Judging the operating status of the vacuum system according to its variation characteristics, roughly judging the leakage point location and narrowing the leakage investigation range are one of the effective measures to shorten the leakage of RH vacuum system.