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本文简要介绍一台七十米长的清洁超高真空空间环模试验设备的设计。设备的检测腔φ1.2米×L5.6米,光路管道φ0.4米×L64米。采用现代的组合抽气手段获得清洁真空。其中:主泵为溅射离子泵,冷阱式升华钛泵作为辅助泵,预抽系统采用机械泵+吸附阱+涡轮分子泵机组。整台设备不烘烤。获得极限真空度P=3.6×10~(-8)托,工作真空度,P=4.3×10~(-7)托,残气中碳氢化合物含量占万分之几,设备振动,(包括地基振动)<1微米。
This article briefly describes the design of a 70-meter-long clean ultrahigh vacuum space ring mold test equipment. Equipment detection chamber φ1.2 m × L5.6 m, light pipe φ0.4 m × L64 meters. Get a clean vacuum with modern combination pumping. Among them: the main pump for the sputtering ion pump, cold sink sublimation titanium pump as a secondary pump, pre-pumping system using mechanical pump + trap + turbomolecular pump unit. The entire equipment is not baked. Obtained the ultimate vacuum P = 3.6 × 10 -8 Torr, working vacuum degree, P = 4.3 × 10 -7 Torr, the residual hydrocarbon content accounted for a few percent, equipment vibration, including the foundation Vibration) <1 micron.