Fabrication of the Sodium Ions Extended Gate Field Effect Transistor by Using the Entrapment Method

• 作 者: Jung-Chuan Chou
• 机 构: Department of Electronic Engineering National Yunlin University of Science and Technology,Douliou,Ta
• 出 处: 稀有金属材料与工程
• 发表日期: 2006年S3期
• 关键词: transistor physiological fabrication Sodium entrapment fabricate organs affects

The sodium ion is necessary in physiological function and an important element in blood of human body,because the concentration of the sodium ion in the blood directly affects the functions of some organs or pathological feature,how to detect it is an important affair.In this paper,we measure the concentration of sodium ions by the extended gate field effect transistor (EGFET).We use three different substrates RuO_x/p-Si,ITO glass,SnO_2/ITO to fabricate EGFET,and we choose the optimum structure.The fabrication of device needed to use the entrapment method.

The sodium ion is necessary in physiological function and an important element in blood of human body, because the concentration of the sodium ion in the blood directly affects the functions of some organs or pathological feature, how to detect it is an important affair.In this paper, we measure the concentration of sodium ions by the extended gate field effect transistor (EGFET) .We use three different substrates RuO_x / p-Si, ITO glass, SnO_2 / ITO to fabricate EGFET, and we choose the optimum structure.The fabrication of device needed to use the entrapment method.