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超精圆度精密主轴在磨削加工时,其圆度误差与回转轴线的误差运动具有相同的数量级,精确的识别和分离这两类误差,对于实现超精圆度加工具有决定性意义。本研究在多测头误差分离原理的基础上,提出了两点法误差分离技术(EST),建立了临床测量与计算机实时处理系统。试验结果证明,在临床测量系统中采用两点法EST具有足够的精确度,较之三点法简便易行,为超精图度磨削及其他精密加工和测量的研究工作提供了新的有效手段。
In the case of grinding, the roundness error of super-precision round precision spindle has the same order of magnitude as the error of rotation axis. Precise identification and separation of these two kinds of errors are of decisive significance for realizing super-round machining. Based on the principle of multi-probe error separation, this paper proposed a two-point error separation (EST) technique and established a clinical measurement and computer real-time processing system. Experimental results show that the two-point method used in the clinical measurement system has sufficient accuracy, which is simple and easy to implement compared with the three-point method, and provides a new effective method for ultra-precision graining and other precision machining and measurement research means.