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使用压电方程结合梁弯曲公式和有限元仿真的方法建立了三叠片式压电加速度传感器的数学模型,通过实验验证了模型的正确性.对三叠片式压电加速度传感器的结构进行了优化设计,在不改变传感器几何轮廓的基础上提高了传感器的灵敏度,并定量分析了不同的结构对传感器性能的影响.提出了三叠片式压电加速度传感器在矢量水听器中的应用方案,使用有限元法对矢量水听器进行了分析计算,制作了矢量水听器样品,并对其主要性能进行了测试.
The mathematical model of triaxial piezo-accelerometer was established by using the piezoelectric equation combined with the beam bending formula and the finite element simulation method, and the correctness of the model was verified by experiments.The structure of the triaxial piezo-accelerometer Optimized design, without changing the geometric contour of the sensor to improve the sensitivity of the sensor, and quantitative analysis of the different structures on the sensor performance. Proposed three-chip piezoelectric accelerometer in the vector hydrophone applications The finite element method was used to analyze and calculate the vector hydrophone. The vector hydrophone sample was made and its main performance was tested.