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利用多弧离子镀在硬质合金基体上制备TiN涂层,研究了N_2/Ar流量比对TiN涂层表面大颗粒分布与力学性能的影响。通过扫描电镜观察TiN涂层的表面形貌,并利用Image J图像处理软件对大颗粒的数量和尺寸进行了分析,通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明:随着N2流量的增加,涂层表面沉积颗粒的最大直径和平均直径逐渐减小,涂层的附着力整体呈现增加趋势,显微硬度则先增大后减小。
TiN coating was prepared on cemented carbide substrate by multi-arc ion plating. The effect of flow ratio of N 2 / Ar on the distribution and mechanical properties of large particles on the surface of TiN coating was studied. The surface morphology of TiN coating was observed by scanning electron microscope. The number and size of large particles were analyzed by Image J image processing software. The mechanical properties of TiN coatings were characterized by automatic scratch tester and nanoindenter. The results show that with the increase of N2 flow rate, the maximum diameter and the average diameter of the deposited particles on the surface of the coating decrease gradually, the adhesion of the coating shows an overall increasing tendency, while the microhardness firstly increases and then decreases.