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为了便于使用四极质谱计分析真空系统中的残余气体,我们制做了图形系数换算器。其中,真空泵油,六氟化硫等12种是我们采用国产四极质谱计SJX—l和ZP-4001,在以溅射离子泵为主泵的真空系统上测试的结果。并参考了国内外的有关数据。此图给出的真空泵油图形系数是真空系统受泵油一
In order to facilitate the use of quadrupole mass spectrometer analysis of the residual gas in the vacuum system, we made a graphics coefficient converter. Among them, 12 kinds of vacuum pump oil and sulfur hexafluoride are the results of tests on the vacuum system with the SJX-1 and ZP-4001 made by the domestic quadrupole mass spectrometer as the main pump with sputtering ion pump. And with reference to the relevant data at home and abroad. This figure shows the vacuum pump oil pattern factor is a vacuum pump oil