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旋转元件式椭圆偏振仪,是一种光度式椭偏仪。它不采用消光原理而以测量椭圆偏振光的强度为基础,利用计算机求出偏振参数ψ、Δ,因而具有较高的测量速度。旋转检偏器时,不能测定Δ的符号,但是可运用于不同波长的测量。旋转四分之一波片时则是一种完全的椭偏仪,能唯一确定Δ,ψ值。本文介绍了利用旋转四分之一波片式椭偏仪对蒸发中的介质膜进行实时测量的结果。
Rotating element ellipsometer, is a photometric ellipsometer. It does not use extinction principle to measure the intensity of elliptically polarized light based on the use of computer to find the polarization parameters ψ, Δ, and therefore has a high measurement speed. When the analyzer is rotated, the sign of Δ can not be measured, but it can be applied to the measurement of different wavelengths. Rotating the quarter-wave plate is a complete ellipsometer that uniquely determines the values of Δ and ψ. This paper presents the results of a real-time measurement of the dielectric film in evaporation using a rotating quarter-wave plate ellipsometer.