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温度误差和非线性误差是影响MEMS加速度计精度、限制其应用领域的两个重要因素。研究了国内外MEMS加速度计误差补偿方法,分析了MEMS加速度计的温度误差和非线性误差来源。为了消除一款50g量程的数字式MEMS加速度计的误差,采用分段线性拟合插值法进行了零偏温度补偿;同时采用基于预测模型的分段插值法对加速度计的非线性误差进行了校正。测试结果表明,经过补偿后,加速度计全温区(-40℃~60℃)零偏变化量从33.95mg提升到了1.02mg,标度因数温度系数从4.205×10~(-5)/℃提升到了0.74×10~(-6)/℃,满量程非线性度从1.010 022×10~(-2)提升到了1.479 9×10~(-4)。该方法算法简单,效果显著,适合于工程应用。
Temperature error and nonlinear error are two important factors that affect the accuracy of MEMS accelerometer and limit its application. The error compensation method of MEMS accelerometer at home and abroad is studied, and the temperature error and nonlinear error source of MEMS accelerometer are analyzed. In order to eliminate the error of a 50g range digital MEMS accelerometer, the piecewise linear fitting interpolation method is used to compensate the bias temperature. At the same time, the nonlinear error of the accelerometer is corrected by the piecewise interpolation method based on the prediction model . The test results show that after the compensation, the zero bias of the full temperature range of the accelerometer (-40 ℃ ~ 60 ℃) increases from 33.95mg to 1.02mg, and the temperature coefficient of scale factor increases from 4.205 × 10 -5 / ℃ At 0.74 × 10 -6 / ℃, full scale nonlinearity increased from 1.010 022 × 10 -2 to 1.479 9 × 10 -4. The method is simple and effective and suitable for engineering application.