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随着哈特曼传感器测量口径的增大,采样点数对被测波前的空间分辨率、测量精度及动态范围的影响也随之增大,因此通过计算机仿真波前径向斜率拟合过程,分析出采样点数和斜率探测误差对测量精度和测量范围的影响。计算机仿真的波前斜率拟合所用泽尼克多项式达到121项,测量口径2m,测量精度要求λ/50,径向(半径)和切向最少采样点数分别为10点和21点。当径向和切向采样点数分别为40点和250点,斜率测量误差为0.045″时,所测波前的P-V值范围是0-4λ。
With the increase of the measurement aperture of the Hartmann sensor, the influence of the sampling points on the spatial resolution, the measurement accuracy and the dynamic range of the wavefront to be measured also increases. Therefore, by fitting the wavefront radial slope fitting process by the computer, Analysis of the sampling points and the slope of the detection error on the measurement accuracy and measurement range. Computer simulation of the frontier slope of the fitted Zernike polynomial to achieve 121, measuring diameter 2m, measurement accuracy required λ / 50, radial (radius) and tangential minimum sampling points were 10 points and 21 points. When the radial and tangential sampling points are 40 o’clock and 250 o’clock respectively and the slope measurement error is 0.045 ", the P-V range of the measured wavefront is 0-4λ.