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在80年代后期,国际高技术领域出现了一个值得重视的发展新动向——微机械技术(micromechanism),即微机电系统(micro-electro-mechanicalsystem—MEMS)的崛起.微机电系统是体积非常小、重量很轻的机电一体化产品.其工作状况一般用肉眼是看不见的,必须借助于显微镜或专用仪器来观察.从产品角度看,它是利用微细加工技术将机构及其致动器、控制器、传感器、电源等集成在一个微小体积范围内发挥机械功能的机电一体化产品;从技术角度看,它是机、电、光、磁、化学、自动控制.传感技术与信息处理等多种技术
In the late 1980s, there was a new development trend worthy of attention in the field of international high-tech - the rise of micromechanism, that is, the micro-electro-mechanical system (MEMS) , Light weight mechatronic products.The working conditions are generally invisible with the naked eye, you must use the microscope or special equipment to observe.From the product perspective, it is the use of microfabrication technology and its actuators, It is a mechanical, electrical, optical, magnetic, chemical, automatic control, sensor technology, information processing and so on, which is integrated into a tiny volumetric range of controller, sensor, power supply and so on. A variety of technologies