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利用半导体激光器线性调频技术制成了新型的外差干涉仪。分析了干涉仪的测量原理、动态范围及精确度,测量了压电陶瓷的电压-位移曲线。
The use of semiconductor laser chirp technology made a new type of heterodyne interferometer. The measurement principle, dynamic range and accuracy of the interferometer are analyzed. The voltage-displacement curve of the piezoelectric ceramic is measured.