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介绍了用于波长为 15 5 0nm光通讯波分复用 /解复用滤光片的离子束溅射的Ta2 O5和SiO2 薄膜在法里珀罗多层膜中的折射率的实时拟合方法及拟合结果 ,给出了它们的淀积时间、淀积速率和计算的光学厚度 ,分析了这些结果的可靠性
A real-time fitting method for the refractive index of the Ta 2 O 5 and SiO 2 thin films in Farnelian multilayer films by ion beam sputtering of a wavelength of 1550 nm optical communication wavelength division multiplexing / demultiplexing filter And the results of the fitting, their deposition time, deposition rate and calculated optical thickness are given, the reliability of these results is analyzed