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本文讨论了加速电压和样品表面粗糙度对X射线能谱仪(EDS)分析精度的影响。结果表明:不同元素的特征X射线强度最大值所对应的加速电压不同;当加速电压一定时,表面粗糙对特征X射线强度的影响是造成分析误差的主要原因之一。
This article discusses the effects of accelerated voltage and sample surface roughness on the analytical accuracy of X-ray energy dispersive spectrometers (EDS). The results show that the accelerating voltages corresponding to the maximum values of the characteristic X-ray intensities of different elements are different. When the accelerating voltage is constant, the influence of surface roughness on the characteristic X-ray intensities is one of the main causes of the analysis errors.