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本文详细介绍了日本近几年来一般真空获得设备、无油真空系统和真空应用设备的最近进展，并指出由于日本半导体和ＬＣＤ（液晶显示）产业的迅速发展带动了日本整个的真空工业，使日本的真空产品出现了更新换代的局面
This article details Japan’s recent progress in general vacuum access equipment, oil-free vacuum systems and vacuum applications in recent years and points out that Japan’s entire vacuum industry has been driven by the rapid development of Japan’s semiconductor and LCD (liquid crystal display) industries, The vacuum products appeared the situation of replacement