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Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.
Recently, the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased. Herefore the development of technology for countermeasure against CWA has been highly demanded. In this study, thick film SnO_2 -based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP), acetonitrile, dichloromethane and dipropylene glycol methyl ether have been investigated. And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents. The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.