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采用准分子激光扫描消融法淀积性能均匀的ＹＢａ_２Ｃｕ_３Ｏ_（７－δ）高温超导薄膜，用离子束刻蚀进行器件的图形制备，获得了非均匀性小于１０％的ＹＢａ_２Ｃｕ_３Ｏ_（７－δ）高温超导薄膜８元线列探测器．测试了器件在８～１４μｍ波段的性能及光响应特性，单元探测器为４０×１００μｍ２的微桥结构．器件的平均归一化探测率为１．４４×１０９ｃｍＨｚ１／２ｗ－１，平均噪声等效功率为４．４×１０－１２ＷＨｚ－１／２，Ｄ的非均匀性小于１０％．研究结果表明：该线列探测器具有良好的均匀性，证实了该工艺适用于制备均匀性良好的高温超导薄膜红外探测器阵列．
The YBa 2 Cu 3 O 7 - δ high temperature superconducting thin films with uniform properties were deposited by excimer laser scanning ablation method and the device was patterned by ion beam etching to obtain high temperature YBa 2 Cu 3 O 7 - δ with nonuniformity less than 10% Superconducting thin film 8 yuan line detector. The performance and photoresponse characteristics of the device in the 8 ~ 14μm wavelength range were tested. The cell detector was a 40 × 100μm2 micro-bridge structure. The average normalized detection rate of the device is 1.44 × 109cmHz1 / 2w-1, the average noise equivalent power is 4.4 × 10-12WHz-1/2, and the non-uniformity of D is less than 10%. The results show that the line array detector has a good uniformity, confirming that the process is suitable for preparing a high-temperature superconducting thin film infrared detector array with good uniformity.