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主要研究 Ｔｉ 质量分数对 Ｆｅ Ｔｉ Ｎ 纳米薄膜的结构及软磁性能的影响， 表明为获得具有优良软磁性能的 Ｆｅ Ｔｉ Ｎ 薄膜， 必须选择合适的 Ｔｉ 含量． 研究了不同 Ｔｉ 质量分数时薄膜的性能和相组成并分析了其原因
The effects of Ti mass fraction on the structure and soft magnetic properties of Fe Ti N nanofilms were investigated. It is suggested that proper Ti content should be chosen to obtain the Fe Ti N thin films with excellent soft magnetic properties. The properties and phase compositions of the films with different Ti mass fractions were studied and the reasons for their formation were analyzed