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本文介绍高亮度小型液态金属Ga离子源。本源在5.5kV的引出电压下总发射电流可达250μA,发射阈值电压低至1kV(发射体针尖到引出极膜孔中心的距离固定在2mm左右)。在1.33×10~(-6)Pa的真空度下测量源的发射特性,并对Taylor锥发射模型作了初步探讨。通过对发射体基底尖端进行特殊的铬合处理,可有效地增大发射电流,提高发射稳定性。整个系统封装在直径为55mm的玻壳内;发射体尖端与引出极间距离采用一特殊柄在0.5～5mm范围内在管外调节。
This article describes the high brightness small liquid metal Ga ion source. The total emission current of the source can reach 250μA at a voltage of 5.5kV and the emission threshold voltage is as low as 1kV (the distance between the tip of the emitter and the center of the film hole in the emitter is fixed at about 2mm). The emission characteristics of the source were measured under a vacuum of 1.33 × 10 ~ (-6) Pa. The Taylor cone emission model was also discussed. By special chrome coating of the emitter substrate tip, the emission current can be effectively increased and the emission stability can be improved. The entire system is encapsulated in a 55mm diameter glass bulb; the distance between the emitter tip and the lead-out pole is adjusted outside the tube with a special handle in the range of 0.5-5 mm.