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斯图加特大学设计与加工技术系、光学与精密工具技术研究所举办的传统的光学研讨会于1996年2月21日召开。重点课题是:微型结构、近场显微术、干涉测量术和加工测量技术。主办人为工程光学研究所的Tiziani教授。与会人员约300人。Tiziani教授首先做“三维测量技术的概括”报告,特别介绍了干涉测量的技术水平和发展趋向。相位测量与三角测量方法越来越变得实用,此外,还介绍了许多革新技术,如三波长干涉测量与斜光干涉测量的结合,用于粗糙表面的单位测量。还有双波长本振干涉测量、双本振干涉测量和白光干涉测量。在这方面新的内容是在保持干涉测量分辨率的情况下,增大了单值性的范围。图1介绍了一台扫描短相干干涉仪的结构示意图。由于单值性范围的增大,这种方法还可用来测量分离的表面(如测量继电器衔铁)。
The traditional optical seminar organized by the Stuttgart University Department of Design and Process Technology and the Institute of Optics and Precision Tools was held on February 21, 1996. Key topics are: micro-structure, near-field microscopy, interferometry and processing and measurement techniques. The host is Professor Tiziani, Institute of Engineering Optics. About 300 participants. Professor Tiziani firstly made a report of “Summarization of 3D Measurement Technology”, especially introducing the technical level and development trend of interferometry. Phase measurement and triangulation methods are becoming more and more practical. In addition, many innovative techniques are introduced, such as the combination of three-wavelength interferometry and oblique-light interferometry for unit measurements of rough surfaces. There are two-wavelength local oscillation interferometry, dual vibration detection and white light interference measurements. The new content in this area is to increase the range of unambiguities while maintaining the resolution of interferometric measurements. Figure 1 shows the structure of a scanning short coherent interferometer. This method can also be used to measure separate surfaces (eg measuring relay armatures) due to the increased range of singular values.