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研究了准分子激光辐照WC-6w+%Co(YG6)硬质合金工具衬底产生的选择性蒸发和表面改性作用(粗糙化),YG6表面的钴含量被有效地降低。研究了在硬质合金YG6工具衬底沉积金刚石薄膜的良好工艺参数范围,由于钴的存在和迁移,沉积金刚石薄膜的温度和甲烷浓度范围变窄。对金刚石薄膜与硬质合金衬底的结合力进行了初步测试和讨论。
The effects of selective evaporation and surface modification (roughening) on the WC-6w +% Co (YG6) cemented carbide substrate irradiated by excimer laser were studied. The cobalt content on YG6 surface was effectively reduced. The range of good process parameters for the deposition of diamond films on cemented carbide YG6 tool substrates was studied. The temperature and methane concentration range of the deposited diamond films became narrower due to the presence and migration of cobalt. The bonding force between diamond film and cemented carbide substrate has been preliminarily tested and discussed.