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梳齿式电容加速度传感器检测电容的测量结果会受到除感应电容之外的其他等效电路参数的影响。梳齿式电容加速度传感器的结构与多层瓷片电容(MLCC)的结构类似,因此可以借鉴多层瓷片电容中等效电路参数的研究方法对电容加速度传感器中的等效电路参数进行研究。本文将对梳齿式电容加速度传感器检测结构中的等效电路参数进行建模,并分析这些等效电路参数对测试结果产生的影响。
The measurement results of the comb capacitor acceleration sensor detection capacitor are affected by other equivalent circuit parameters than the sensing capacitor. The structure of the comb-tooth capacitive accelerometer is similar to that of MLCC. Therefore, the equivalent circuit parameters in capacitive accelerometer can be studied by referring to the research methods of equivalent circuit parameters in multilayer ceramic capacitors. In this paper, the equivalent circuit parameters in the detecting structure of the comb-tooth capacitive acceleration sensor are modeled, and the influence of these equivalent circuit parameters on the test results is analyzed.