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用XPS对不同凡的Gd-Ba-Cu-O超导膜做了定量、角分布、成象和离子剥蚀纵深分析．结果表明：样品表面都存在Ba富集和Gd短缺，表面原子微观分布不均匀；表面和纵深都存在含C物质污染；与Tc≥87K的样品比较，Tc≤77K的膜表面对应于非超导相的Ba和O原子浓度最高，膜的纵深处的原子组成仍偏离化学计量，而且膜表面和纵深处的含C物污染最严重．
Quantitative, angular distribution, imaging and ion ablation depth analyzes of different Gd-Ba-Cu-O superconducting films were performed by XPS. The results show that there are Ba enrichment and Gd shortage on the sample surface, and the microscopic distribution of surface atoms is uneven. The surface and depth of the sample contain contamination of substance C. Compared with samples with Tc ≧ 87K, the surface of Tc≤77K corresponds to non-superconducting The Ba and O atoms have the highest concentration in the phase. The atomic composition in the depth of the film still deviates from the stoichiometry, and the C content in the surface and depth of the film is the most polluted.