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1.引言精确测量表面的技术特性,如粗糙度达几纳米,形状偏差达几十纳米以及同等量级的机械动态操作的波动性,变得越来越重要,因此过去几年完善和新发展了几种测量法。在几种非接触光学测量法中,动态聚焦法由于其测得的表面轮廓信息量大、水平和垂直分辨率高,动态性能明显、操作简便且接近实用而占重要地位。发展技术的出发点是高水平,这一点近几年已用光盘技术重现音频和视频信号达到。光盘存储信息的扫描问题是可在粗糙的工件表面传输,于是发展了利用动态聚焦原理的表面测量仪,显示出众和广泛的应用可能性。此技术由Kohno和Shiono和几家制
1. INTRODUCTION It has become more and more important to accurately measure the technical properties of surfaces, such as roughness of a few nanometers, variations of tens of nanometers in shape, and fluctuations in mechanical dynamic operation of the same order, so that improvements and new developments over the past few years Several measurement methods. In several non-contact optical measurement methods, dynamic focusing method plays an important role because of its large amount of surface profile information, high horizontal and vertical resolution, obvious dynamic performance, easy operation and practical application. The starting point for the development of technology is a high level, which has been achieved in recent years by using optical disc technology to reproduce audio and video signals. The problem of scanning the information stored on the optical disc is that it can be transmitted on a rough workpiece surface. Therefore, a surface measuring instrument using the principle of dynamic focusing has been developed to show superiority and a wide range of application possibilities. This technique is made by Kohno and Shiono and several systems