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介绍溶胶-凝胶法制备SiO2减反膜的溶液配制,基片清洗和膜层制备过程,利用正硅酸乙酯的碱性催化水解,通过浸入移液法在石英透镜的表面涂敷一层多孔SiO2减反膜,涂膜后石英透镜的透过率在350um波长处达到98.0%以上。
The solution preparation, substrate cleaning and film preparation of SiO2 antireflective film prepared by sol-gel method were introduced. By the basic catalytic hydrolysis of tetraethyl orthosilicate, the surface of quartz lens was coated by immersion pipetting method Porous SiO2 anti-reflection film, the transmittance of the quartz lens after coating reached 98.0% at 350um wavelength.