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介绍了一种基于微机械技术实现的可变光衰减器,通过微电磁驱动器改变输入输出光纤之间的径向偏移量来调整衰减量。基于波导传输理论分析确定了器件的结构参量,并通过集成电路微细加工工艺实现了器件的制作和封装。测试结果表明,该可变光衰减器的插入损耗小于1dB,动态范围约35dB,工作电压小于5V,偏振相关损耗小于0.1dB,体积为20mm×15mm×8mm,有望为全光网提供一种低成本,高性能的光通信器件。
A variable optical attenuator based on micromechanical technology is introduced to adjust the attenuation by changing the radial offset between the input and output optical fibers by a micro-electromagnetic actuator. Based on the theory of waveguide transmission, the structural parameters of the device are determined, and fabrication and packaging of the device are realized through the micro-fabrication process of the integrated circuit. The test results show that the insertion loss of the variable optical attenuator is less than 1dB, the dynamic range is about 35dB, the operating voltage is less than 5V, the polarization-dependent loss is less than 0.1dB and the volume is 20mm × 15mm × 8mm. Cost, high performance optical communication devices.