An inverse problem in film/substrate indentation:extracting both the Young's modulus and thickne

• 作 者: Yin Zhang Feifei Gao Zhiyue Zh
• 机 构: StateKeyLaboratoryofNonlinearMechanics（LNM）,SchoolofEngineeringScience,DepartmentofPhysicsandBeijing
• 出 处: 力学学报:英文版
• 发表日期: 2018年6期
• 关键词: INDENTATION test FILM SUBSTRATE Inverse problem
• 基金项目: This research was supported by the National Natural Science Foundation of China(11772335,21622304,61674045,and 21203038),by the Ministry of Science and Technology(MOST)of China(2016YFA0200700).Z.H.Che

In an indentation test,the effective Young's modulus of a film/substrate bilayer heterostructure varies with the indentation depth,a phenomenon known as the substrate effect.In previous studies investigating this,only the Young's modulus of the fi