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对于薄层厚度的测量,在工程及科学研究中均有十分广泛的应用。本文针对精确测量薄层厚度的要求。提出了一种新的同态信号处理方法。这种方法的基本原理是对被测信号的能量谱的对数导数进行傅里叶反变换,得出其在时域的包络,从包络中得出其所需的时间延迟信息,从而得到薄层的厚度。与其他测量厚度的信号处理技术相比,其精度和测量的厚度极限及抗干扰性能均有很大提高,显示了很好的发展前景。
For the thickness of the measurement, in engineering and scientific research have a very wide range of applications. This article is aimed at accurately measuring the thickness of thin layers. A new homomorphic signal processing method is proposed. The basic principle of this method is that the logarithmic derivative of the energy spectrum of the signal under test is inverse Fourier transformed to obtain its envelope in the time domain and to derive the required time delay information from the envelope so that The thickness of the layer is obtained. Compared with other signal processing techniques for measuring thickness, the accuracy and thickness limit of measurement and anti-jamming performance have greatly improved, showing a good development prospect.