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介绍了在研制的采用蠕动式微进给和线放电磨削走丝机构的微细电火花加工装置上进行的加工工艺实验研究。探讨了微细电火花加工微小轴 (工具电极 )、高深宽比微小孔、非圆截面形状和三维结构成形以及半导体硅材料等的工艺方法
In this paper, the experimental research of machining process on the micro-EDM device with creeping micro-feed and wire discharge grinding is carried out. The technological process of micro-EDM micro-axis (tool electrode), high aspect ratio micro-hole, non-circular cross-section shape and three-dimensional structure forming and semiconductor silicon material are discussed