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叙述了一种用椭偏技术快速测量表面微粗糙度的方法，推导了在单层膜模型下微粗糙表面的反射特性，给出了根据椭偏测量所得位相差△值估算均方根粗糙度的公式以及对两种不同微粗糙度表面测量的结果。
A method for rapid measurement of surface micro-roughness by ellipsometry is described. The reflection characteristics of micro-rough surface under single-layer film model are deduced. The rms roughness As well as the results of two different micro-roughness surface measurements.