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超精密机床主轴轴承常采用回转精度高、刚度大、吸振性好的静压轴承,可是,静压轴承的摩擦损失引起的发热还是较大的,这会使主轴在轴向产生热位移,致使加工精度受到影响。解决这一问题的关键是寻找一种热膨胀趋于零的主轴材料。过去,减小热变形的对策,是把加工产生的热传给另外的某种媒体,以防止要求物体的温度升高。可是这种方法由于不能将热变形量变为零,依然无法避免主轴的热变形造成的加工误差。现在,在超精密加工中为了减小机床的热变形,多采用一些控制室温、
Ultra-precision machine tool spindle bearings often use high precision, high stiffness, good vibration absorption of static pressure bearings, but static friction bearing friction caused by fever or larger, which will make the spindle in the axial thermal displacement, resulting in Processing accuracy affected. The key to solving this problem is to find a spindle material that tends to zero in thermal expansion. In the past, the countermeasure to reduce thermal deformation was to transfer the heat generated by processing to another medium to prevent the temperature of the object from increasing. However, due to this method can not be thermal deformation becomes zero, still can not avoid the spindle thermal deformation caused by the processing error. Now, in ultra-precision machining in order to reduce the thermal deformation of machine tools, use more control room temperature,