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一、原理粗细光栅组合,产生干涉条纹的光路原理示于图1,基本情况文献中已经叙述。现对干涉条纹的产生、定位和干涉条纹相对光栅位移的灵敏度作一说明。 1.干涉条纹的产生使光束经细光栅衍射后产生强度相同的0级与-1级衍射光束,射到粗光栅后再次衍射,由物镜后焦面上的空间滤波器(狭缝)取出一组平行于光轴的光束,如(-1,m/2)和(0,(-m)/2)(m为粗、细光栅栅距比,并假定m为偶数)。在狭缝后面毛玻璃上即可看到干涉条纹。如果粗、细
First, the principle of thickness grating combination of interference fringes generated light path shown in Figure 1, the basic situation has been described in the literature. Now the interference fringes generation, positioning and interference fringes relative to the sensitivity of grating displacement made a note. 1. Generation of interference fringes The beam is diffracted by a fine grating to produce 0-order and -1-order diffracted beams of the same intensity, which are diffracted after reaching the coarse grating and taken out by a spatial filter (slit) on the back focal plane of the objective lens Set of light beams parallel to the optical axis such as (-1, m / 2) and (0, (- m) / 2) (m is coarse, fine grating pitch ratio and m is assumed to be even). An interference fringe can be seen on the ground glass behind the slit. If thick, thin