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在ｎ－ＧａＰ衬底上制作共面波导（ＣＰＷ），用质子轰击的方法减小共面波导的漏电损失，用倍频扫描移相电光采样技术测量了１～５ＧＨｚ微波信号．质子轰击后ＧａＰＣＰＷ的电阻增大了４个量级，在２．３０ＧＨｚ微波信号时，质子轰击ＧａＰＣＰＷ电光采样测量获得了１０ｍＶ／Ｈｚ的电压灵敏度．
Coplanar waveguide (CPW) was fabricated on n-GaP substrate. The leakage loss of coplanar waveguide was reduced by proton bombardment. The microwave signal of 1 ~ 5GHz was measured by frequency doubling sweep phase-shifting electro-optical sampling technique. The resistance of GaPCPW increased four orders of magnitude after proton bombardment. At 2.30GHz microwave signal, the voltage sensitivity of 10mV / Hz was obtained by proton bombardment GaPCPW electro-optical sampling measurement.