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针对集成角度传感器微镜在实际使用过程中的要求,在分析研究MOEMS扫描微镜结构与工作原理的基础上,进行了MOEMS扫描微镜最大偏转角度、驱动电压、谐振频率和传感器输出参数的测试.并且为了提高数据的可靠性,利用几何光学理论和误差理论的方法对该测试系统进行了详细分析,以此作为测试的系统误差与测试随机误差进行了误差合成.误差分析表明,该微镜在驱动电压为0.7 V时,最大偏转角为±8.704 15°,测试误差为±0.045 605°.此外,还对测试过程中扫描微镜谐响应频率随扫描模式及扫描电压而变化的现象进行了分析.
Aiming at the requirements of the integrated angle sensor micromirror in actual use, based on the analysis of the structure and working principle of the MOEMS scanning micromirror, the maximum deflection angle, driving voltage, resonant frequency and sensor output parameters of the MOEMS scanning micromirror were tested In order to improve the reliability of the data, this system is analyzed in detail using the theory of geometrical optics and the theory of error, which can be used as the error synthesis of the systematic error of the test and the random error of the test.The error analysis shows that the micromirror At a driving voltage of 0.7 V, the maximum deflection angle is ± 8.704 15 ° and the test error is ± 0.045 605 °. In addition, the response frequency of the scanning micromirror during the test varies with the scanning mode and the scanning voltage analysis.