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机械部北京自动化所和北京仪器厂于1985年研制成功了一台ZLZ-200型离子注入机,并通过了机械部仪表局组织的鉴定离子注入机是生产集成电路的关键设备。它可以准确地控制渗杂剂量的浓度和深度,而且横向扩散很小,在国外已在集成电路生产中普遍使用。七十年代初国际上只有小束流机,七十年代中期已使用中束流机,1978年以后开始发展低能强流机。目前我国中束流半导体注入机刚刚门世,急待进一步
Machinery Department of Beijing Institute of Automation and Beijing Instrument Factory in 1985, the successful development of a ZLZ-200 ion implanter, and passed the Department of Mechanical Instrument Bureau of the identification of ion implanter is the production of integrated circuits, the key equipment. It can accurately control the concentration and depth of the dopant dose, and lateral diffusion is very small, has been widely used in the production of integrated circuits in foreign countries. In the early seventies, there was only a small beam streamer in the world, mid beam streamer was used in the mid-1970s, and low-energy streamer was developed after 1978. At present, China’s beam semiconductor injection machine has just arrived, urgent need further