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一、概述完美品体的研究即常说的晶体微观缺陷的研究。晶体的完美与缺陷是对立统一地存在。晶体中存在着缺陷就叫晶体的不完美性,理想的无缺陷的晶体称为完美晶体。晶体中的缺陷有两大类:宏观缺陷和微观缺陷。宏观缺陷常见的有小亮点、星形缺陷、球状体、多晶点、乳突、划痕等;微观缺陷常见的有位错和层错。层错是目前国内外研究微观缺陷的中心,层错除外延层错外还有热氧化堆垛层错等。位错研究中心是晶体形变而产生的位错。完美晶体对提高器件的可靠性、重复性以及封装密度是非常重要的。因为缺陷会影响器
First, an overview of the perfect body of research that is often said that the study of crystal microscopic defects. The perfection and flaw of the crystal are the existence of opposites. There are defects in the crystal called the imperfection of the crystal, the ideal non-defective crystal called the perfect crystal. There are two major types of defects in the crystal: macro defects and micro defects. Macro defects are common small bright spots, star defects, spheroids, polycrystalline point, papillae, scratches; microscopic defects are common dislocations and faults. Fault at home and abroad is the focus of micro-defects at home and abroad, the fault layer of the epitaxial layer error in addition to thermal oxidation stacking faults. Dislocation Research Center is the distortion produced by the crystal dislocation. The perfect crystal is very important to improve the reliability, repeatability and packing density of the device. Because defects can affect the device